1/14/2010	10:44:01 AM	Program started normally
1/14/2010	10:44:03 AM	Main Vac valve opened
1/14/2010	10:44:04 AM	Bypass valve opened
1/14/2010	10:45:14 AM	Helium MFC set to  100.000000
1/14/2010	10:45:45 AM	Helium MFC set to  200.000000
1/14/2010	10:47:29 AM	Helium valve opened
1/14/2010	10:51:04 AM	Helium MFC set to  300.000000
1/14/2010	10:51:19 AM	Helium MFC set to  0.000000
1/14/2010	10:51:31 AM	Helium MFC set to  300.000000
1/14/2010	10:52:02 AM	Helium MFC set to  500.000000
1/14/2010	10:53:15 AM	Helium valve closed
1/14/2010	10:53:19 AM	Helium MFC set to  0.000000
1/14/2010	10:53:21 AM	Helium valve opened
1/14/2010	10:53:23 AM	Helium valve closed
1/14/2010	10:53:33 AM	H2 MFC set to  0.000000
1/14/2010	10:53:35 AM	Helium MFC set to  0.000000
1/14/2010	10:53:36 AM	BCl3 valve opened
1/14/2010	10:53:36 AM	BCl3 valve closed
1/14/2010	10:53:40 AM	BCl3 MFC set to  0.000000
1/14/2010	10:53:54 AM	H2 MFC set to  100.000000
1/14/2010	10:53:58 AM	H2 valve opened
1/14/2010	10:55:11 AM	H2 MFC set to  0.000000
1/14/2010	10:55:13 AM	H2 valve closed
1/14/2010	10:56:44 AM	Program exited cleanly
1/14/2010	11:56:17 AM	Program started normally
1/14/2010	11:56:18 AM	Bypass valve opened
1/14/2010	11:56:19 AM	Main Vac valve opened
1/14/2010	11:56:20 AM	Helium valve opened
1/14/2010	11:57:01 AM	Helium MFC set to  100.000000
1/14/2010	11:59:47 AM	H2 MFC set to  200.000000
1/14/2010	11:59:52 AM	H2 valve opened
1/14/2010	12:00:10 PM	Helium MFC set to  100.000000
1/14/2010	12:00:16 PM	H2 valve closed
1/14/2010	12:00:20 PM	H2 valve opened
1/14/2010	12:00:23 PM	H2 valve closed
1/14/2010	12:00:28 PM	H2 MFC set to  0.000000
1/14/2010	12:00:47 PM	Helium valve closed
1/14/2010	12:01:22 PM	Helium MFC set to  0.000000
1/14/2010	12:01:23 PM	Helium valve opened
1/14/2010	12:51:15 PM	Error setting the  Helium MFC to 0.000000
1/14/2010	12:51:22 PM	Program exited cleanly
1/14/2010	12:51:24 PM	Program started normally
1/14/2010	12:51:25 PM	Helium valve opened
1/14/2010	12:51:26 PM	Bypass valve opened
1/14/2010	12:51:26 PM	Main Vac valve opened
1/14/2010	12:52:37 PM	Error setting the  Helium MFC to 100.000000
1/14/2010	12:53:20 PM	Error setting the  Helium MFC to 100.000000
1/14/2010	12:53:22 PM	Helium valve closed
1/14/2010	12:53:23 PM	Helium valve opened
1/14/2010	12:53:38 PM	Error setting the  Helium MFC to 500.000000
1/14/2010	12:53:45 PM	Program started after a nonstandard shutdown
1/14/2010	12:53:47 PM	Main Vac valve opened
1/14/2010	12:53:47 PM	Bypass valve opened
1/14/2010	12:53:53 PM	Error setting the  Helium MFC to 100.000000
1/14/2010	12:54:00 PM	Helium valve opened
1/14/2010	12:54:01 PM	Helium valve closed
1/14/2010	12:54:05 PM	Helium valve opened
1/14/2010	12:54:18 PM	Error setting the  Helium MFC to 100.000000
1/14/2010	12:54:20 PM	Helium valve closed
1/14/2010	12:54:26 PM	Error setting the  Helium MFC to 200.000000
1/14/2010	12:54:27 PM	Helium valve opened
1/14/2010	12:54:29 PM	Helium valve closed
1/14/2010	12:54:37 PM	Helium valve opened
1/14/2010	12:54:49 PM	Error setting the  Helium MFC to 0.000000
1/14/2010	12:54:51 PM	Helium valve closed
1/14/2010	1:16:28 PM	Program exited cleanly
1/14/2010	1:17:46 PM	Program started normally
1/14/2010	1:17:48 PM	Bypass valve opened
1/14/2010	1:17:48 PM	Main Vac valve opened
1/14/2010	1:17:50 PM	Helium valve opened
1/14/2010	1:17:50 PM	Helium valve closed
1/14/2010	1:17:55 PM	Error setting the  Helium MFC to 100.000000
1/14/2010	1:18:23 PM	Program exited cleanly
1/14/2010	1:23:41 PM	Program started normally
1/14/2010	1:23:45 PM	Bypass valve opened
1/14/2010	1:23:46 PM	Main Vac valve opened
1/14/2010	1:23:54 PM	Helium valve opened
1/14/2010	1:23:56 PM	Helium valve closed
1/14/2010	1:24:03 PM	Helium MFC set to  100.000000
1/14/2010	1:24:04 PM	Helium valve opened
1/14/2010	1:25:15 PM	Helium valve closed
1/14/2010	1:25:20 PM	Helium valve opened
1/14/2010	1:25:25 PM	Helium MFC set to  500.000000
1/14/2010	1:27:46 PM	H2 valve opened
1/14/2010	1:28:10 PM	H2 valve closed
1/14/2010	1:30:44 PM	Helium valve closed
1/14/2010	1:33:47 PM	Helium valve opened
1/14/2010	1:34:06 PM	Helium MFC set to  300.000000
1/14/2010	1:34:16 PM	Helium MFC set to  100.000000
1/14/2010	1:34:28 PM	Helium valve closed
1/14/2010	1:35:48 PM	Helium MFC set to  500.000000
1/14/2010	1:35:50 PM	Helium valve opened
1/14/2010	1:35:51 PM	Helium valve closed
1/14/2010	1:35:55 PM	Helium valve opened
1/14/2010	1:35:57 PM	Helium valve closed
1/14/2010	4:35:41 PM	Bypass valve closed
1/14/2010	4:35:41 PM	Bypass valve opened
1/14/2010	4:35:42 PM	Main Vac valve closed
1/14/2010	4:35:43 PM	Main Vac valve opened
1/14/2010	8:40:39 PM	Program exited cleanly
1/14/2010	8:43:34 PM	Program started normally
1/14/2010	8:43:36 PM	Bypass valve opened
1/14/2010	8:43:36 PM	Main Vac valve opened
1/14/2010	8:43:37 PM	Helium valve opened
1/14/2010	8:44:03 PM	Helium MFC set to  100.000000
1/14/2010	8:44:50 PM	Helium MFC set to  500.000000
1/14/2010	8:44:59 PM	Helium valve closed
1/14/2010	8:45:31 PM	Helium valve opened
1/14/2010	8:45:55 PM	Helium MFC set to  100.000000
1/14/2010	8:46:17 PM	Helium valve closed
1/14/2010	8:47:11 PM	Helium valve opened
1/14/2010	8:47:46 PM	Helium MFC set to  500.000000
1/14/2010	8:48:48 PM	Helium valve closed
1/14/2010	8:48:56 PM	Helium valve opened
1/14/2010	8:49:27 PM	Helium valve closed
1/14/2010	8:50:02 PM	H2 valve opened
1/14/2010	8:50:14 PM	H2 MFC set to  100.000000
1/14/2010	8:50:27 PM	H2 valve closed
1/14/2010	8:50:29 PM	H2 valve opened
1/14/2010	8:55:11 PM	Program started after a nonstandard shutdown
1/14/2010	8:55:12 PM	Bypass valve opened
1/14/2010	8:55:12 PM	Main Vac valve opened
1/14/2010	8:55:33 PM	H2 valve opened
1/14/2010	8:55:36 PM	H2 valve closed
1/14/2010	8:55:37 PM	H2 valve opened
1/14/2010	8:55:49 PM	H2 MFC set to  0.000000
1/14/2010	8:55:58 PM	H2 MFC set to  100.000000
1/14/2010	8:56:08 PM	H2 MFC set to  500.000000
1/14/2010	8:56:18 PM	H2 valve closed
1/14/2010	8:56:53 PM	H2 valve opened
1/14/2010	8:57:00 PM	H2 valve closed
1/14/2010	8:57:16 PM	H2 valve opened
1/14/2010	8:57:18 PM	H2 valve closed
1/14/2010	8:57:48 PM	H2 MFC set to  100.000000
1/14/2010	8:57:49 PM	H2 valve opened
1/14/2010	8:57:59 PM	H2 MFC set to  300.000000
1/14/2010	8:58:08 PM	H2 MFC set to  500.000000
1/14/2010	8:58:13 PM	H2 valve closed
1/14/2010	10:23:12 PM	Program started after a nonstandard shutdown
1/14/2010	10:23:13 PM	Bypass valve opened
1/14/2010	10:23:13 PM	Main Vac valve opened
1/14/2010	10:23:16 PM	H2 valve opened
1/14/2010	10:23:17 PM	H2 valve closed
1/14/2010	10:23:20 PM	Helium valve opened
1/14/2010	10:23:20 PM	Helium valve closed
1/14/2010	10:24:23 PM	Helium MFC set to  0.000000
1/14/2010	10:24:27 PM	H2 MFC set to  100.000000
1/14/2010	10:24:49 PM	H2 valve opened
1/14/2010	10:25:08 PM	Bypass solenoid MFC set to  760.000000
1/14/2010	10:25:10 PM	Main Vac valve closed
1/14/2010	10:25:21 PM	H2 MFC set to  200.000000
1/14/2010	10:25:28 PM	H2 MFC set to  400.000000
1/14/2010	10:25:35 PM	H2 MFC set to  500.000000
1/14/2010	10:26:06 PM	SiCl4 MFC set to  100.000000
1/14/2010	10:26:14 PM	BCl3 MFC set to  2.000000
1/14/2010	10:27:02 PM	Bypass valve closed
1/14/2010	10:27:04 PM	Bubbler valve opened
1/14/2010	10:30:07 PM	BCl3 valve opened
1/14/2010	10:30:24 PM	BCl3 valve closed
1/14/2010	10:30:51 PM	SiCl4 pre valve opened
1/14/2010	10:30:53 PM	SiCl4 post valve opened
1/14/2010	10:30:58 PM	SiCl4 post valve closed
1/14/2010	10:31:02 PM	SiCl4 pre valve closed
1/14/2010	10:32:40 PM	SiCl4 pre valve opened
1/14/2010	10:32:48 PM	SiCl4 post valve opened
1/14/2010	10:32:49 PM	SiCl4 post valve closed
1/14/2010	10:32:50 PM	SiCl4 post valve opened
1/14/2010	10:33:06 PM	SiCl4 post valve closed
1/14/2010	10:33:07 PM	SiCl4 pre valve closed
1/14/2010	10:33:25 PM	Bubbler valve closed
1/14/2010	10:33:26 PM	Bypass valve opened
1/14/2010	10:33:31 PM	H2 valve closed
1/14/2010	10:33:32 PM	Bypass valve closed
1/14/2010	10:33:41 PM	Bypass solenoid MFC set to  760.000000
